MECHANICAL-PROPERTIES OF LANI5 THIN-FILMS PREPARED BY SPUTTERING AND VAPOR-DEPOSITION METHODS AND DETERMINATION OF THE HYDROGEN CONTENT IN THESE FILMS

被引:30
作者
SAKAGUCHI, H [1 ]
TANIGUCHI, N [1 ]
SERI, H [1 ]
SHIOKAWA, J [1 ]
ADACHI, G [1 ]
机构
[1] OSAKA UNIV,FAC ENGN,DEPT APPL CHEM,SUITA,OSAKA 565,JAPAN
关键词
D O I
10.1063/1.341943
中图分类号
O59 [应用物理学];
学科分类号
摘要
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页码:888 / 892
页数:5
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