MECHANICAL-PROPERTIES OF LANI5 THIN-FILMS PREPARED BY SPUTTERING AND VAPOR-DEPOSITION METHODS AND DETERMINATION OF THE HYDROGEN CONTENT IN THESE FILMS

被引：30

作者：

SAKAGUCHI, H ^{[1
]}

TANIGUCHI, N ^{[1
]}

SERI, H ^{[1
]}

SHIOKAWA, J ^{[1
]}

ADACHI, G ^{[1
]}

机构：

[1] OSAKA UNIV,FAC ENGN,DEPT APPL CHEM,SUITA,OSAKA 565,JAPAN

来源：

关键词：

D O I：

10.1063/1.341943

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：888 / 892

页数：5

共 24 条

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