EVALUATION OF A NEW POLISH FOR GALLIUM ARSENIDE USING A PEROXIDE-ALKALINE SOLUTION

被引：58

作者：

DYMENT, JC

ROZGONYI, GA

机构：

来源：

关键词：

D O I：

10.1149/1.2408319

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：1346 / &

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