SPIRAL GROWTH IN EPITAXIAL YBA2CU3O7-X THIN-FILMS PRODUCED BY HIGH DEPOSITION RATE CHEMICAL VAPOR-DEPOSITION

被引:26
作者
LUO, L [1 ]
HAWLEY, ME [1 ]
MAGGIORE, CJ [1 ]
DYE, RC [1 ]
MUENCHAUSEN, RE [1 ]
CHEN, L [1 ]
SCHMIDT, B [1 ]
KALOYEROS, AE [1 ]
机构
[1] SUNY ALBANY,DEPT PHYS,ALBANY,NY 12222
关键词
D O I
10.1063/1.108914
中图分类号
O59 [应用物理学];
学科分类号
摘要
A technologically useful chemical vapor deposition process with high growth rate ( > 4 mum/h) was developed for the epitaxial growth of YBa2Cu3O7-x (YBCO) thin films. Even at the high growth rate used in this process, a spiral growth mechanism was observed and the films grown had electrical (T(c) = 92 K, J(c) of 2 X 10(6) A/cm2 at 77 K) and structural properties equal to films produced by physical vapor deposition.
引用
收藏
页码:485 / 486
页数:2
相关论文
共 11 条
[1]  
CHEN L, 1992, AIP C P, V251, P223
[2]   EPITAXIAL THIN-FILMS OF YBA2CU3O7-X ON LAAIO3 SUBSTRATES DEPOSITED BY PLASMA-ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].
CHERN, CS ;
ZHAO, J ;
LI, YQ ;
NORRIS, P ;
KEAR, B ;
GALLOIS, B ;
KALMAN, Z .
APPLIED PHYSICS LETTERS, 1991, 58 (02) :185-187
[3]   SCREW DISLOCATIONS IN HIGH-TC FILMS [J].
GERBER, C ;
ANSELMETTI, D ;
BEDNORZ, JG ;
MANNHART, J ;
SCHLOM, DG .
NATURE, 1991, 350 (6316) :279-280
[4]   GROWTH-MECHANISM OF SPUTTERED FILMS OF YBA2CU3O7 STUDIED BY SCANNING TUNNELING MICROSCOPY [J].
HAWLEY, M ;
RAISTRICK, ID ;
BEERY, JG ;
HOULTON, RJ .
SCIENCE, 1991, 251 (5001) :1587-1589
[5]   SINGLE SOURCE METALORGANIC CHEMICAL VAPOR-DEPOSITION OF LOW MICROWAVE SURFACE-RESISTANCE YBA2CU3O7 [J].
HISKES, R ;
DICAROLIS, SA ;
YOUNG, JL ;
LADERMAN, SS ;
JACOWITZ, RD ;
TABER, RC .
APPLIED PHYSICS LETTERS, 1991, 59 (05) :606-607
[6]  
Libby H., 1971, INTRO ELECTROMAGNETI
[7]   SCANNING TUNNELING MICROSCOPY OF THE SURFACE-MORPHOLOGY OF YBA2CU3OX THIN-FILMS BETWEEN 300K AND 76K [J].
MORELAND, J ;
RICE, P ;
RUSSEK, SE ;
JEANNERET, B ;
ROSHKO, A ;
ONO, RH ;
RUDMAN, DA .
APPLIED PHYSICS LETTERS, 1991, 59 (23) :3039-3041
[8]   CLEAN GRAIN-BOUNDARIES AND WEAK LINKS IN HIGH-TC SUPERCONDUCTING YBA2CU3O7-X THIN-FILMS [J].
SHIN, DH ;
SILCOX, J ;
RUSSEK, SE ;
LATHROP, DK ;
MOECKLY, B ;
BUHRMAN, RA .
APPLIED PHYSICS LETTERS, 1990, 57 (05) :508-510
[9]   ION-CHANNELING STUDY OF SINGLE-CRYSTAL YBA2CU3OX [J].
STOFFEL, NG ;
MORRIS, PA ;
BONNER, WA ;
WILKENS, BJ .
PHYSICAL REVIEW B, 1988, 37 (04) :2297-2300
[10]   SPIRAL GROWTH OF CRYSTALS - SIMULATIONS ON A STOCHASTIC-MODEL [J].
SWENDSEN, RH ;
KORTMAN, PJ ;
LANDAU, DP ;
MULLERKRUMBHAAR, H .
JOURNAL OF CRYSTAL GROWTH, 1976, 35 (01) :73-78