FABRICATION OF PLANAR SILICON TRANSISTORS WITHOUT PHOTORESIST

[1] ELECTRON BEAM FABRICATION OF SMALL GEOMETRY TRANSISTORS [J]. SOLID-STATE ELECTRONICS, 1967, 10 (05) : 491 - &

[2] OKEEFFE TW, 1966, OCT ECS FALL M PHIL

[3] OKEEFFE TW, 1966, OCT IEEE EL DEV M WA

[4] OKEEFFE TW, 1965, SPR M ECS SAN FRANC

[5] OKEEFFE TW, IN PRESS

[6] VAVILOV VS, 1965, EFFECTS RADIATION SE

[1] ELECTRON BEAM FABRICATION OF SMALL GEOMETRY TRANSISTORS [J]. SOLID-STATE ELECTRONICS, 1967, 10 (05) : 491 - &

[2] OKEEFFE TW, 1966, OCT ECS FALL M PHIL

[3] OKEEFFE TW, 1966, OCT IEEE EL DEV M WA

[4] OKEEFFE TW, 1965, SPR M ECS SAN FRANC

[5] OKEEFFE TW, IN PRESS

[6] VAVILOV VS, 1965, EFFECTS RADIATION SE