ELECTRON-STIMULATED DESORPTION OF CHLORINE FROM GAAS(100) SURFACES

被引:16
作者
MOKLER, SM
WATSON, PR
UNGIER, L
ARTHUR, JR
机构
[1] OREGON STATE UNIV,DEPT CHEM,CORVALLIS,OR 97331
[2] OREGON STATE UNIV,CTR ADV MAT RES,CORVALLIS,OR 97331
[3] OREGON STATE UNIV,DEPT ELECT & COMP ENGN,CORVALLIS,OR 97331
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 05期
关键词
D O I
10.1116/1.584925
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1109 / 1112
页数:4
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