VAPOR-PHASE DEPOSITION OF THICK EPITAXIAL (100) ZNS LAYERS ON ELEMENTAL AND COMPOUND SUBSTRATES IN H2 GAS-FLOW

被引:17
作者
LILLEY, P [1 ]
KAY, PMR [1 ]
LITTING, CNW [1 ]
机构
[1] UNIV MANCHESTER,DEPT ELECT ENGN,MANCHESTER,ENGLAND
关键词
D O I
10.1007/BF00540821
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:1317 / 1322
页数:6
相关论文
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