CHROMIUM SILICIDE FORMATION WITH MULTIPLE ELECTRON-BEAM PULSES

被引:2
作者
DANNA, E [1 ]
LEGGIERI, G [1 ]
LUCHES, A [1 ]
MAJNI, G [1 ]
机构
[1] UNIV MODENA,DEPARTIMENTO FIS,I-41100 MODENA,ITALY
关键词
D O I
10.1016/0040-6090(86)90170-7
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
4
引用
收藏
页码:163 / 166
页数:4
相关论文
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OTTAVIANI, G .
THIN SOLID FILMS, 1986, 136 (01) :93-104
[2]   HEAT-FLOW TRANSIENTS IN SI/PT SYSTEMS [J].
DANNA, E ;
LEGGIERI, G ;
LUCHES, A ;
NAVA, F .
THIN SOLID FILMS, 1983, 110 (01) :83-92
[3]  
DANNA E, 1985, ENERGY BEAM SOLID IN, P187
[4]  
MURARKA SP, 1983, SILICIDES VLSI APPLI