ELECTROCHEMICAL ASPECTS OF BEVELING OF SPUTTERED PERMALLOY-FILMS

被引：11

作者：

KELLY, JJ

KOEL, GJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1978年 / 125卷 / 06期

关键词：

D O I：

10.1149/1.2131568

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：860 / 865

页数：6

共 19 条

[1] EXPERIMENTAL INVESTIGATION OF PARAMETERS DETERMINING ANODIC BEHAVIOR OF TITANIUM IN FLUORINATED SULFURIC SOLUTIONS [J].

CAPRANI, A .

JOURNAL DE CHIMIE PHYSIQUE ET DE PHYSICO-CHIMIE BIOLOGIQUE, 1975, 72 (02) :171-182

[2] ELECTROETCHING OF PLATINUM IN TITANIUM-PLATINUM-GOLD METALLIZATION ON SILICON INTEGRATED-CIRCUITS [J].

FRANKENTHAL, RP ;

EATON, DH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (05) :703-706

[3] ANODIC DISSOLUTION OF DELTA-CU5CD8 - STABILIZATION AND ACTIVATION OF CONSTITUENT METALS [J].

HORI, Y ;

IKAWA, M ;

MUKAIBO, T .

ELECTROCHIMICA ACTA, 1974, 19 (09) :569-573

[4] ELECTROCHEMICAL STUDY OF UNDERCUTTING DURING ETCHING OF DUPLEX METAL-FILMS [J].

KELLY, JJ ;

MINJER, CHD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (07) :931-936

[5]

KELLY JJ, 1976, 27TH M ISE ZUR

[6]

KERN W, 1972, J ELCHEM SO, V118, P1699

[7]

KOEL GJ, 1974, MAY EL SOC M SAN FRA

[8]

KOEL GJ, 1976, MAY EL SOC M WASH

[9]

KOEL GJ, UNPUBLISHED

[10] COMBINED THIN-FILM MAGNETORESISTIVE READ, INDUCTIVE WRITE HEADS [J].

LIER, JCV ;

KOEL, GJ ;

GESTEL, WJV ;

POSTMA, L ;

GERKEMA, JT ;

GORTER, FW ;

DRUYVESTEYN, WF .

IEEE TRANSACTIONS ON MAGNETICS, 1976, 12 (06) :716-718

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