ELECTROLESS DEPOSITION OF SEMICONDUCTOR-FILMS

被引:29
作者
SHARMA, NC [1 ]
KAINTHLA, RC [1 ]
PANDYA, DK [1 ]
CHOPRA, KL [1 ]
机构
[1] INDIAN INST TECHNOL,CTR ENERGY STUDIES,NEW DELHI 110029,INDIA
关键词
D O I
10.1016/0040-6090(79)90346-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
An electroless (solution growth) technique for the deposition of thin films of a variety of multicomponent alloys (e.g. Cd1-xZnxS, Pb1-xHgxS and Cd1-xPbxSe) of II-VI and IV-VI semiconductors has been developed. The technique involves the recombination on a suitably prepared substrate of two or more ions produced during a well-controlled chemical reaction. Films are obtained by an energetic ion-by-ion condensation process and exhibit nucleation and growth stages. The technique allows the preparation of thin films with polymorphic structures and variable compositions. © 1979.
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页码:55 / 59
页数:5
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