A PRECISION TABLE FOR ULTRAHIGH-VACUUM MADE OF ALUMINUM-ALLOYS

被引:6
作者
SAEKI, H [1 ]
IKEDA, J [1 ]
ISHIMARU, H [1 ]
机构
[1] NATL LAB HIGH ENERGY PHYS,TSUKUBA,IBARAKI 305,JAPAN
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 05期
关键词
D O I
10.1116/1.575617
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2883 / 2886
页数:4
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[1]   ALL-ALUMINUM-ALLOY ULTRAHIGH-VACUUM SYSTEM FOR A LARGE-SCALE ELECTRON POSITRON COLLIDER [J].
ISHIMARU, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :1170-1175
[2]   ALUMINUM-ALLOY ULTRAHIGH-VACUUM SYSTEM FOR MOLECULAR-BEAM EPITAXY [J].
MIYAMOTO, M ;
SUMI, Y ;
KOMAKI, S .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (06) :2515-2519