ALUMINUM-ALLOY ULTRAHIGH-VACUUM SYSTEM FOR MOLECULAR-BEAM EPITAXY

被引：15

作者：

MIYAMOTO, M ^{[1
]}

SUMI, Y ^{[1
]}

KOMAKI, S ^{[1
]}

机构：

[1] NATL LAB HIGH ENERGY PHYS,TSUKUBA,IBARAKI 305,JAPAN

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1986年 / 4卷 / 06期

关键词：

D O I：

10.1116/1.573720

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：2515 / 2519

页数：5

共 11 条

[1] A LARGE ALUMINUM-ALLOY MOLECULAR-BEAM EPITAXY CHAMBER WITH AN ULTIMATE PRESSURE OF 7.5X10-12TORR
CHEN, JR
NARUSHIMA, K
MIYAMOTO, M
ISHIMARU, H
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (06): : 2200 - 2204
[2] VACUUM OUTGASSING OF VARIOUS MATERIALS
ERIKSON, ED
BEAT, TG
BERGER, DD
FRAZIER, BA
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 206 - 210
[3] GRAIN-BOUNDARY DIFFUSION OF LIQUID-METAL COOLANTS IN OPTICAL-MATERIALS FOR USE WITH HIGH-POWER SYNCHROTRON RADIATION
HUNTER, WR
WILLIAMS, RT
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1984, 222 (1-2) : 359 - 363
[4] ISHIDA J, 1985, ZOOL SCI, V2, P1
[5] ALL-ALUMINUM-ALLOY ULTRAHIGH-VACUUM SYSTEM FOR A LARGE-SCALE ELECTRON POSITRON COLLIDER
ISHIMARU, H
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 1170 - 1175
[6] MIYAMOTO M, 1984, 8TH P S ISIAT TOKY, P187
[7] Narushima K., 1984, Journal of the Vacuum Society of Japan, V27, P457, DOI 10.3131/jvsj.27.457
[8] NARUSHIMA K, 1982, J VAC SOC JPN, V25, P172
[9] NARUSHIMA K, 1986, 33RD P OYO BUTS GAKK
[10] NARUSHIMA K, 1983, JPN J VAC SOC, V26, P353