PREPARATION OF CROSS-SECTIONAL TEM SAMPLES WITH OBSERVABLE THIN-SECTIONS AT DESIRED REGIONS OF NONUNIFORM SURFACED SEMICONDUCTING DEVICES

被引：7

作者：

RAI, AK

RASHID, MH

PRONKO, PP

EZIS, A

LANGER, DW

机构：

[1] USAF,WRIGHT AERONAUT LABS,AVION LAB,WRIGHT PATTERSON AFB,OH 45433

[2] UNIVERSAL ENERGY SYST INC,DIV MAT RES,4401 DAYTON XENIA RD,DAYTON,OH 45432

来源：

JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1002/jemt.1060050104

中图分类号：

Q [生物科学];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

引用

页码：45 / 50

页数：6

共 5 条

[1] CROSS-SECTIONAL SPECIMENS FOR TRANSMISSION ELECTRON-MICROSCOPY [J].

ABRAHAMS, MS ;

BUIOCCHI, CJ .

BRAVMAN, JC ;

SINCLAIR, R .

JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1984, 1 (01) :53-61

[3]

LUCK JT, 1985, P ELECTRON MICROSC S, V43, P166

[4] A PROCEDURE TO PREPARE CROSS-SECTIONAL SAMPLES FOR TEM [J].

RIVAUD, L .

JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1985, 2 (06) :577-580

[5]

SHENG TT, 1976, IEEE T ELECTRON DEV, V23, P531, DOI 10.1109/T-ED.1976.18447