MATERIAL CHARACTERIZATION USING A FREQUENCY-DOUBLING 2-COLOR INTERFEROMETER

被引：4

作者：

MATSUMOTO, H

机构：

[1] National Research Laboratory of Metrology, Tsukuba, Ibaraki 305

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 09期

关键词：

Characterization - Crystals - Detectors - Heterodyning - Light modulators - Light polarization - Materials - Potassium compounds - Refractive index - Second harmonic generation - Titanium;

D O I：

10.1063/1.1144634

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new characterization method of materials processed by ion beams or laser beams using a two-color interferometer with two frequency-doubling optical crystals is described, based on the dispersion property of the materials. Resolution of measurement is improved to an optical phase of 1 degrees (subnanometers) by use of a heterodyne technique with acousto-optic modulators.

引用

页码：2894 / 2895

页数：2

共 5 条

[1] MEASUREMENT OF RMS ROUGHNESS, AUTOCOVARIANCE FUNCTION AND OTHER STATISTICAL PROPERTIES OF OPTICAL SURFACES USING A FECO SCANNING INTERFEROMETER [J].