EFFECT OF ELECTRODE MATERIAL ON MEASURED ION ENERGY-DISTRIBUTIONS IN RADIOFREQUENCY DISCHARGES

被引：25

作者：

OLTHOFF, JK

VANBRUNT, RJ

RADOVANOV, SB

机构：

[1] National Institute of Standards and Technology, Gaithersburg

来源：

APPLIED PHYSICS LETTERS | 1995年 / 67卷 / 04期

关键词：

D O I：

10.1063/1.114540

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Evidence is presented for a significant influence of electrode surface material and condition on the measurement of the kinetic energies of ions sampled from discharges through an orifice in the electrode. Significant differences in ion energy shifts and/or discrimination of low-energy ions are found using aluminum and stainless-steel electrodes in a radio-frequency (rf) discharge cell. It is argued that the observed differences in energy shifts may be attributable in part to differences in charging of oxide layers on the electrode surface around the sampling orifice. (C) 1995 American Institute of Physics.

引用

页码：473 / 475

页数：3

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