ON MEASUREMENT OF IMPURITY ATOM DISTRIBUTIONS BY DIFFERENTIAL CAPACITANCE TECHNIQUE

被引：105

作者：

KENNEDY, DP

OBRIEN, RR

机构：

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1969年 / 13卷 / 02期

关键词：

D O I：

10.1147/rd.132.0212

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

引用

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页码：212 / &

相关论文

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[3] FRANKLIN P, 1940, TREATISE ADVANCED CA
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[5] METHOD FOR MEASURING IMPURITY DISTRIBUTIONS IN SEMICONDUCTOR CRYSTALS
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[6] IMPURITY DISTRIBUTION IN EPITAXIAL SILICON FILMS
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