IMPURITY DISTRIBUTION IN EPITAXIAL SILICON FILMS

[1] BASSECHES H, 1961, AUG AIME SEM MET C L

[2] Grossman J.W., COMMUNICATION

[3] ANOMALOUS IMPURITY DIFFUSION IN EPITAXIAL SILICON NEAR THE SUBSTRATE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (11) : 1106 - 1108

[4] KLEIN DL, 1961, MAY SEM S EL SOC IND

[5] MATOVICH E, 1961, OCT SEM S EL SOC DET

[6] MILLER KJ, 1961, OCT SEM S EL SOC DET

[7] Simplified and advanced Theory of the Boundary Layer Rectifiers [J]. ZEITSCHRIFT FUR PHYSIK, 1942, 118 (9-10): : 539 - 592

[8] Spitzer W, COMMUNICATION

[9] PURIFICATION OF SICL4 BY ADSORPTION TECHNIQUES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (01) : 29 - 32

[10] EPITAXIAL SILICON FILMS BY THE HYDROGEN REDUCTION OF SIC1 [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (07) : 649 - 653

[1] BASSECHES H, 1961, AUG AIME SEM MET C L

[2] Grossman J.W., COMMUNICATION

[3] ANOMALOUS IMPURITY DIFFUSION IN EPITAXIAL SILICON NEAR THE SUBSTRATE [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1962, 109 (11) : 1106 - 1108

[4] KLEIN DL, 1961, MAY SEM S EL SOC IND

[5] MATOVICH E, 1961, OCT SEM S EL SOC DET

[6] MILLER KJ, 1961, OCT SEM S EL SOC DET

[7] Simplified and advanced Theory of the Boundary Layer Rectifiers [J]. ZEITSCHRIFT FUR PHYSIK, 1942, 118 (9-10): : 539 - 592

[8] Spitzer W, COMMUNICATION

[9] PURIFICATION OF SICL4 BY ADSORPTION TECHNIQUES [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1960, 107 (01) : 29 - 32

[10] EPITAXIAL SILICON FILMS BY THE HYDROGEN REDUCTION OF SIC1 [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1961, 108 (07) : 649 - 653