X-RAY REFLECTION FROM ROUGH LAYERED SYSTEMS

被引：270

作者：

HOLY, V ^{[1
]}

KUBENA, J ^{[1
]}

OHLIDAL, I ^{[1
]}

LISCHKA, K ^{[1
]}

PLOTZ, W ^{[1
]}

机构：

[1] KEPLER UNIV, INST OPTOELECTR, A-4040 LINZ, AUSTRIA

来源：

PHYSICAL REVIEW B | 1993年 / 47卷 / 23期

关键词：

D O I：

10.1103/PhysRevB.47.15896

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The specular and nonspecular x-ray reflectivity of a rough multilayer is calculated on the basis of the distorted-wave Born approximation. The theory explains the existence of maxima in the angular distribution of a nonspecularly reflected wave. The interface roughness has been characterized by root-mean-square roughness, lateral correlation length, and the fractal dimension of the interface. It has been demonstrated that these parameters can be obtained from nonspecular reflectivity measurements. Calculations based on this theory compare well with data measured on rough layered samples.

引用

页码：15896 / 15903

页数：8

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