HIGHLY SENSITIVE PHOTODETECTOR USING POROUS SILICON

被引:179
作者
ZHENG, JP [1 ]
JIAO, KL [1 ]
SHEN, WP [1 ]
ANDERSON, WA [1 ]
KWOK, HS [1 ]
机构
[1] SUNY BUFFALO,DEPT ELECT & COMP ENGN,BUFFALO,NY 14260
关键词
D O I
10.1063/1.107884
中图分类号
O59 [应用物理学];
学科分类号
摘要
A highly sensitive photodetector was made with a metal-porous silicon junction. The spectral response was measured for the wavelength range from 400 nm to 1.075-mu-m. It was demonstrated that close to unity quantum efficiency could be obtained in the wavelength range of 630-900 nm without any antireflective coating. The detector response time was about 2 ns with a 9 V reverse bias. The possible mechanisms are discussed.
引用
收藏
页码:459 / 461
页数:3
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