HIGH TRANSCONDUCTANCE IN-PLANE-GATED TRANSISTORS

被引:47
作者
WIECK, AD [1 ]
PLOOG, K [1 ]
机构
[1] MAX PLANCK INST FESTKORPERFORSCH,W-7000 STUTTGART 80,GERMANY
关键词
D O I
10.1063/1.107712
中图分类号
O59 [应用物理学];
学科分类号
摘要
Focused-ion-beam written one-dimensional field-effect transistors are fabricated and characterized at room temperature. By writing these in-plane-gated channels with geometrical widths of 0.2-1.1-mu-m in heterostructures, we obtain one-dimensional transconductances of up to 170-mu-S for two channels in parallel. We determine the effective width of the channels, which ranges between 790 nm and zero, being still reproducibly tunable at a few nanometers. The reproducibility in fabrication already of the prototypes presented here is sufficient for integration applications. We observe current densities, which can only be explained by a strong velocity overshoot of the electrons and promises excellent high-frequency behavior of the device. The in-plane-gate transistor does not need any alignment and can easily be interconnected and integrated with a writing speed exceeding 10(6) devices per s.
引用
收藏
页码:1048 / 1050
页数:3
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