PHOTON-STIMULATED DESORPTION OF FLUORINE FROM SILICON VIA SUBSTRATE CORE EXCITATIONS

被引：37

作者：

YARMOFF, JA

JOYCE, SA

机构：

来源：

PHYSICAL REVIEW B | 1989年 / 40卷 / 05期

关键词：

D O I：

10.1103/PhysRevB.40.3143

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：3143 / 3150

页数：8

共 28 条

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