ANNEALING RESPONSE OF DISORDERED SPUTTER DEPOSITED VANADIUM PENTOXIDE (V2O5)

被引:19
作者
LUKSICH, J
AITA, CR
机构
[1] UNIV WISCONSIN,DEPT MAT,POB 784,MILWAUKEE,WI 53201
[2] JOHNSON CONTROLS INC,DIV SYST & SERV,MILWAUKEE,WI 53201
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 03期
关键词
D O I
10.1116/1.577405
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report the response to isothermal, low temperature (280-degrees-C) annealing in air for up to 60 min, in terms of changes in crystallography and optical absorption coefficient alpha(E) of two types of sputter deposited, disordered vanadium pentoxide; (1) an amorphous film and (2) a single <010>-crystallographic orientation film in which the interlayer spacing b is slightly greater (0.03%) than b0, the ideal value. It was found that low temperature annealing does not crystallize amorphous vanadium pentoxide, and that no change occurs in alpha(E) in the charge transfer region E greater-than-or-equal-to approximately 2.5 eV. The Tauc nondirect optical band gap E' = 2.34 eV. However, the low energy absorption tail present in the as-grown amorphous film disappears upon annealing, attributed to the elimination of V+4 sites. On the other hand, annealing crystalline vanadium pentoxide causes crystallographic changes, the interlayer spacing expands, and concurrently, alpha(E) in the charge transfer region, E greater-than-or-equal-to 2.6 eV, increases. In agreement with a recent theoretical band calculation and single crystal data, the indirect optical band gap E(i) = 2.36 eV for both as-grown and annealed crystalline vanadium pentoxide.
引用
收藏
页码:542 / 546
页数:5
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