MAGNETRON SPUTTERED TIN NITRIDE

被引：45

作者：

LIMA, RS ^{[1
]}

DIONISIO, PH ^{[1
]}

SCHREINER, WH ^{[1
]}

ACHETE, C ^{[1
]}

机构：

[1] UNIV FED RIO DE JANEIRO,COPPE,ESTUDOS MAT & INTERFACES LAB,BR-21945 RIO DE JANEIRO,RJ,BRAZIL

来源：

SOLID STATE COMMUNICATIONS | 1991年 / 79卷 / 05期

关键词：

D O I：

10.1016/0038-1098(91)90491-D

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Tin Nitride obtained by magnetron sputtering has been studied with Conversion Electron Mossbauer Spectroscopy, X-ray diffraction, Auger Electron Spectroscopy and Rutherford Backscattering Spectroscopy. The results indicate a stable and well crystallized compound.

引用

页码：395 / 398

页数：4

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