SENSITIVITY AND MODE SPECTRUM OF A FREQUENCY-OUTPUT SILICON PRESSURE SENSOR

被引:12
作者
ANDRES, MV [1 ]
FOULDS, KWH [1 ]
TUDOR, MJ [1 ]
机构
[1] UNIV SURREY,DEPT PHYS,GUILDFORD GU2 5XH,SURREY,ENGLAND
来源
SENSORS AND ACTUATORS | 1988年 / 15卷 / 04期
关键词
D O I
10.1016/0250-6874(88)81510-5
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
8
引用
收藏
页码:417 / 426
页数:10
相关论文
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