SENSITIVITY AND MODE SPECTRUM OF A FREQUENCY-OUTPUT SILICON PRESSURE SENSOR

被引：12

作者：

ANDRES, MV ^{[1
]}

FOULDS, KWH ^{[1
]}

TUDOR, MJ ^{[1
]}

机构：

[1] UNIV SURREY,DEPT PHYS,GUILDFORD GU2 5XH,SURREY,ENGLAND

来源：

SENSORS AND ACTUATORS | 1988年 / 15卷 / 04期

关键词：

D O I：

10.1016/0250-6874(88)81510-5

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：417 / 426

页数：10

共 8 条

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ANDRES, MV
TUDOR, MJ
FOULDS, KWH
[J]. ELECTRONICS LETTERS, 1987, 23 (15) : 774 - 775
[2] OPTICAL ACTIVATION OF A SILICON VIBRATING SENSOR
ANDRES, MV
FOULDS, KWH
TUDOR, MJ
[J]. ELECTRONICS LETTERS, 1986, 22 (21) : 1097 - 1099
[3] AULD BA, 1973, ACOUSTIC FIELDS WAVE, V2, P76
[4] GREENWOOD CJ, 1984, J PHYS E, V17, P650
[5] GREENWOOD JC, 1987, EUROSENSORS 87
[6] RESONATOR SENSORS - A REVIEW
LANGDON, RM
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1985, 18 (02): : 103 - 115
[7] SILICON AS A MECHANICAL MATERIAL
PETERSEN, KE
[J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457
[8] PIPPARD AB, 1978, PHYSICS VIBRATION, V1, P366