THE BUBBLE COALESCENCE MODEL OF RADIATION BLISTERING

被引:18
作者
YADAVA, RDS
机构
[1] Solid State Physics Laboratory, Delhi, 11007, India
关键词
BLISTERING; -; BUBBLES;
D O I
10.1016/0022-3115(81)90386-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The existence of overpressurized gas bubbles and a mechanism for bubble during low temperature ions implantations argue for the validity of a gas-driven blister formation mechanism.
引用
收藏
页码:47 / 62
页数:16
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