RADIO-FREQUENCY CARRIER AND CAPACTIVE COUPLING PROCEDURES FOR RESISTIVITY AND LIFETIME MEASUREMENTS ON SILICON

被引：7

作者：

WEINGARTEN, IR

ROTHBERG, M

机构：

来源：

关键词：

D O I：

10.1149/1.2428035

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：167 / 171

页数：5

共 6 条

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HENISCH, HK
ZUCKER, J
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1956, 27 (06) : 409 - 410
[2] HENISCH HK, 1951, SEMICONDUCTOR MATERI, P160
[3] KELLER W, COMMUNICATION
[4] OLSHEFSKI PJ, UNPUB J ELECTROCHEMI
[5] OLSHEFSKI PJ, COMMUNICATION
[6] HEAT TREATMENT OF SILICON USING ZONE HEATING TECHNIQUES
THEUERER, HC
WHELAN, JM
BRIDGERS, HE
BUEHLER, E
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1957, 104 (12) : 721 - 723