EVALUATION OF INTRINSIC GETTERING OF GOLD BY OXIDE PRECIPITATION IN CZOCHRALSKI SILICON

被引：7

作者：

PIETILA, DA ^{[1
]}

MASSON, DB ^{[1
]}

机构：

[1] WASHINGTON STATE UNIV, DEPT MECH & MAT ENGN, PULLMAN, WA 99164 USA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期

关键词：

D O I：

10.1149/1.2095716

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：686 / 690

页数：5

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