ELECTRON-MICROSCOPY STUDY OF SPUTTERED NBN FILMS

被引:22
作者
HO, HL [1 ]
KAMPWIRTH, RT [1 ]
GRAY, KE [1 ]
CAPONE, DW [1 ]
CHUMBLEY, LS [1 ]
MESHII, M [1 ]
机构
[1] NORTHWESTERN UNIV,DEPT MAT SCI & ENGN,EVANSTON,IL 60201
关键词
D O I
10.1016/0304-3991(87)90073-8
中图分类号
TH742 [显微镜];
学科分类号
摘要
NIOBIUM COMPOUNDS
引用
收藏
页码:297 / 303
页数:7
相关论文
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