ELECTRON-MICROSCOPY STUDY OF SPUTTERED NBN FILMS

被引：22

作者：

HO, HL ^{[1
]}

KAMPWIRTH, RT ^{[1
]}

GRAY, KE ^{[1
]}

CAPONE, DW ^{[1
]}

CHUMBLEY, LS ^{[1
]}

MESHII, M ^{[1
]}

机构：

[1] NORTHWESTERN UNIV,DEPT MAT SCI & ENGN,EVANSTON,IL 60201

来源：

ULTRAMICROSCOPY | 1987年 / 22卷 / 1-4期

关键词：

D O I：

10.1016/0304-3991(87)90073-8

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

NIOBIUM COMPOUNDS

引用

页码：297 / 303

页数：7

共 25 条

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[20] LOW-LOSS SURFACE IMAGING AND TRANSMISSION MICROSCOPY OF GROWTH OF SOME THIN-FILMS [J].

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