RADIAL OPTICAL-EMISSION PROFILES OF RADIO-FREQUENCY GLOW-DISCHARGES

被引：15

作者：

PENDER, J

BUIE, M

VINCENT, T

HOLLOWAY, J

ELTA, M

BRAKE, ML

机构：

[1] Department of Nuclear Engineering, University of Michigan, Ann Arbor

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 74卷 / 05期

关键词：

D O I：

10.1063/1.354513

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Radial optical emission profiles are determined from Abel inverted emission spectroscopy of a parallel plate radio frequency system known as a GEC Reference Cell. These profiles in general show a nonuniform plasma, annular in shape. Etching results of silicon wafers also follow this annular pattern. This effect is explained by numerically computed large radial and axial electric fields near the edge of the electrodes, produced by the presence of the grounded dark shields.

引用

页码：3590 / 3592

页数：3

共 7 条

[1]

GOPLEN B, 1991, MRCWDCR282 MISS RES

[2]

GREENBERG KE, 1990, SETEC90013 SAND NAT

[3]

HARGIS PJ, IN PRESS REV SCI INS

[4]

MILLER PA, 1990, SETEC900009 SAND NAT

[5]

OLTHOFF JK, 1992, PROCESS MODULE METRO, P168

[6] MICROWAVE RESONANT-CAVITY-PRODUCED AIR DISCHARGES [J].

PASSOW, ML ;

BRAKE, ML ;

LOPEZ, P ;

MCCOLL, WB ;

REPETTI, TE .

IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :219-228

[7] RADIAL FLOW EFFECTS IN A MULTIDIMENSIONAL, 3-MOMENT FLUID MODEL OF RADIO-FREQUENCY GLOW-DISCHARGES [J].

YOUNG, FF ;

WU, CH .

APPLIED PHYSICS LETTERS, 1993, 62 (05) :473-475

← 1 →