MICROWAVE RESONANT-CAVITY-PRODUCED AIR DISCHARGES

被引:15
作者
PASSOW, ML
BRAKE, ML
LOPEZ, P
MCCOLL, WB
REPETTI, TE
机构
[1] Department of Nuclear Engineering, University of Michigan, Ann Arbor, MI 48109, Cooley Building, North Campus
关键词
D O I
10.1109/27.106817
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
Air discharges produced in an Asmussen microwave cavity (0-300 W, 2.45 GHz, CW) between 0.5 and 100 torr were investigated. Gas temperatures (1000-2500 K) were estimated from rotational temperatures obtained from optical emission spectroscopy (OES). These agreed with a simple model of the heat transfer of the gas where Joule heating was included as the source term. Vibrational temperatures (3700-7300 K) were also determined from OES and followed the electron energy trends. Electron density (10(11)-10(13) cm-3), collisional frequency (10(11)-10(12) s-1), and plasma conductivity (0.08-0.3 (OMEGA-m)-1) were calculated from a self-consistent electromagnetic model of the cavity where the plasma was assumed to be a lossy dielectric. Absorbed power, electric, and optical probe measurements were used as the input parameters to the model.
引用
收藏
页码:219 / 228
页数:10
相关论文
共 18 条
[1]  
AGBUR B, 1962, J APPL PHYS, V33, P575
[2]   ELECTRON-CYCLOTRON RESONANCE MICROWAVE DISCHARGES FOR ETCHING AND THIN-FILM DEPOSITION [J].
ASMUSSEN, J .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1989, 7 (03) :883-893
[3]   DESIGN OF A MICROWAVE PLASMA CAVITY [J].
ASMUSSEN, J ;
MALLAVARPU, R ;
HAMANN, JR ;
PARK, HC .
PROCEEDINGS OF THE IEEE, 1974, 62 (01) :109-117
[4]   ELECTRON-DENSITY MEASUREMENTS OF ARGON SURFACE-WAVE DISCHARGES [J].
BRAKE, M ;
ROGERS, J ;
PETERS, M ;
ASMUSSEN, J ;
KERBER, R .
PLASMA CHEMISTRY AND PLASMA PROCESSING, 1985, 5 (03) :255-261
[5]   RADIAL NEUTRAL GAS TEMPERATURE AND DENSITY PROFILES IN LOW-PRESSURE ARGON DISCHARGES [J].
EDEN, JG ;
CHERRING.BE .
JOURNAL OF APPLIED PHYSICS, 1973, 44 (11) :4920-4926
[6]  
HARRINGTON RF, 1961, TIME HARMONIC ELECTR, P75
[7]   NEW MICROWAVE PLASMA AT ATMOSPHERIC-PRESSURE [J].
HUBERT, J ;
MOISAN, M ;
RICARD, A .
SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 1979, 34 (01) :1-10
[8]  
JACKSON JD, 1975, CLASSICAL ELECTRODYN, P280
[9]   VISCOSITY AND THERMAL-CONDUCTIVITY OF DRY AIR IN THE GASEOUS-PHASE [J].
KADOYA, K ;
MATSUNAGA, N ;
NAGASHIMA, A .
JOURNAL OF PHYSICAL AND CHEMICAL REFERENCE DATA, 1985, 14 (04) :947-970
[10]  
LOFTHUS A, 1977, J CHEM PHYS REF DATA, V6, P286