共 18 条
[1]
AGBUR B, 1962, J APPL PHYS, V33, P575
[2]
ELECTRON-CYCLOTRON RESONANCE MICROWAVE DISCHARGES FOR ETCHING AND THIN-FILM DEPOSITION
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1989, 7 (03)
:883-893
[6]
HARRINGTON RF, 1961, TIME HARMONIC ELECTR, P75
[8]
JACKSON JD, 1975, CLASSICAL ELECTRODYN, P280
[10]
LOFTHUS A, 1977, J CHEM PHYS REF DATA, V6, P286