LASER DRIVER FOR SOFT-X-RAY PROJECTION LITHOGRAPHY

被引：7

作者：

HAKEL, LA

BEACH, RJ

DANE, CB

ZAPATA, LE

机构：

[1] Lawrence Livermore National Laboratory, Livermore, CA, 94550

来源：

APPLIED OPTICS | 1993年 / 32卷 / 34期

关键词：

PROJECTION LITHOGRAPHY; SOFT X-RAYS; SOLID-STATE LASER; PULSE COMPRESSION; DIODE-PUMPED LASER;

D O I：

10.1364/AO.32.006914

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A design of a diode-pumped Nd:YAG laser for use as the driver for a soft-x-ray projection lithography system is described. This laser will output up to 1 J per pulse with a 2- to 5-ns pulse duration and a 400-Hz pulse repetition rate. The design employs microchannel-cooled diode laser arrays, zigzag slab energy storage, a regenerative amplifier cavity that uses phase conjugator beam correction for near-diffraction-limited beam quality, and stimulated Brillouin scattering pulse compression to achieve the required pulse length.

引用

页码：6914 / 6919

页数：6

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