THE USE OF SCANNING CONDUCTION MICROSCOPY TO PROBE ABRASION OF INSULATING THIN-FILMS

被引：3

作者：

DICKINSON, JT ^{[1
]}

JENSEN, LC ^{[1
]}

SIEK, KH ^{[1
]}

HIPPS, KW ^{[1
]}

机构：

[1] WASHINGTON STATE UNIV,DEPT CHEM,PULLMAN,WA 99164

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 07期

关键词：

D O I：

10.1063/1.1145441

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The use of scanning force microscopy (SFM) to probe wear processes at interfaces is of considerable interest. A simple modification of the SFM which allows one to make highly spatially resolved measurements of conductivity changes produced by abrasion of thin insulating films on metal substrates is presented here. The technique is demonstrated on fluorocarbon polymer thin films deposited on stainless-steel substrates. (C) 1995 American Institute of Physics.

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收藏

页码：3802 / 3806

页数：5

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