SURFACE ORIENTATION EFFECT OF SHADOW OF STACKING FAULT

被引:15
作者
SUNAMI, H
TERASAKI, T
MIYAMOTO, N
NISHIZAW.JI
机构
[1] Research Institute of Electrical Communication, Tohoku University, Sendai
关键词
D O I
10.1063/1.1657258
中图分类号
O59 [应用物理学];
学科分类号
摘要
[No abstract available]
引用
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页码:4670 / &
相关论文
共 2 条
[1]   GEOMETRICAL STABILITY OF SHALLOW SURFACE DEPRESSIONS DURING GROWTH OF (111) AND (100) EPITAXIAL SILICON [J].
DRUM, CM ;
CLARK, CA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1968, 115 (06) :664-&
[2]  
TOLANSKY S, 1948, MULTIPLEBEAM INTERFE