SCANNING MICROBEAM USING A LIQUID-METAL ION-SOURCE

被引：34

作者：

ISHITANI, T

TAMURA, H

TODOKORO, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 01期

关键词：

D O I：

10.1116/1.571313

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：80 / 83

页数：4

共 11 条

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[9] HIGH-INTENSITY SCANNING ION PROBE WITH SUBMICROMETER SPOT SIZE [J].

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[10] MEASUREMENT OF THE ENERGY-DISTRIBUTION OF A GALLIUM LIQUID-METAL ION-SOURCE [J].

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