SCANNING MICROBEAM USING A LIQUID-METAL ION-SOURCE

被引:34
作者
ISHITANI, T
TAMURA, H
TODOKORO, H
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 01期
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D O I
10.1116/1.571313
中图分类号
O59 [应用物理学];
学科分类号
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页码:80 / 83
页数:4
相关论文
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