PERFORMANCE OF HARD DLC PROTECTIVE FILM PREPARED BY PECVD METHOD FOR THIN-FILM MAGNETIC DISK

被引：14

作者：

IECHIKA, K ^{[1
]}

KOKAKU, Y ^{[1
]}

OOTAKE, M ^{[1
]}

ABE, K ^{[1
]}

TANI, H ^{[1
]}

INABA, H ^{[1
]}

机构：

[1] HITACHI LTD,PROD ENGN RES LAB,YOKOHAMA,KANAGAWA 244,JAPAN

来源：

IEEE TRANSACTIONS ON MAGNETICS | 1994年 / 30卷 / 06期

关键词：

D O I：

10.1109/20.334013

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Performance of diamond like carbon (DLC) film prepared by PECVD method has been investigated as the protective film of rigid thin film disk. An in-line sputtering PECVD multilayer deposition system was used for preparation of disk samples. The disks were found to be superior to those disks with conventionally sputtered carbon films in many points such as high durability against CSS tests, smooth coverage over the irregular points of magnetic layer, and as a result, good corrosion resistance even at the thickness of 15 nm or less.

引用

页码：4134 / 4136

页数：3

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