MEASUREMENTS OF CARBON THIN-FILMS USING X-RAY REFLECTIVITY

被引:65
作者
TONEY, MF [1 ]
BRENNAN, S [1 ]
机构
[1] STANFORD SYNCHROTRON RADIAT LAB,STANFORD,CA 94309
关键词
D O I
10.1063/1.344361
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1861 / 1863
页数:3
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