CHEMICAL VAPOR-DEPOSITION OF BORON CARBIDES .2. MORPHOLOGY AND MICROSTRUCTURE

被引：23

作者：

OLSSON, M

SODERBERG, S

STRIDH, B

JANSSON, U

CARLSSON, JO

机构：

[1] AB SANDVIK COROMANT, S-12612 STOCKHOLM, SWEDEN

[2] UNIV UPPSALA, DEPT CHEM, THIN FILM & SURFACE CHEM GRP, S-75121 UPPSALA, SWEDEN

来源：

THIN SOLID FILMS | 1989年 / 172卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90121-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：95 / 109

页数：15

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