INSITU MEASUREMENT OF SPUTTERING YIELD OF GRAPHITE BY VUV LASER FLUORESCENCE SPECTROSCOPY

被引：1

作者：

KAJIWARA, T ^{[1
]}

MATSUDA, Y ^{[1
]}

MURAOKA, K ^{[1
]}

OKADA, T ^{[1
]}

MAEDA, M ^{[1
]}

AKAZAKI, M ^{[1
]}

机构：

[1] KYUSHU UNIV,DEPT ELECT ENGN,FUKUOKA 812,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1988年 / 27卷 / 06期

关键词：

D O I：

10.1143/JJAP.27.1105

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1105 / 1106

页数：2

共 10 条

[1]

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