DIAGNOSTICS OF AN RF SPUTTERING GLOW DISCHARGE, CORRELATION BETWEEN ATOMIC-ABSORPTION AND MASS-SPECTROMETRY

被引：52

作者：

ECKSTEIN, EW ^{[1
]}

COBURN, JW ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA

来源：

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES | 1975年 / 17卷 / 02期

关键词：

D O I：

10.1016/0020-7381(75)85039-X

中图分类号：

O64 [物理化学（理论化学）、化学物理学]; O56 [分子物理学、原子物理学];

学科分类号：

070203 ; 070304 ; 081704 ; 1406 ;

摘要：

引用

收藏

页码：129 / 138

页数：10

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