METAL-CONTAINING PLASMA POLYMERIZED FLUOROCARBON FILMS - THEIR SYNTHESIS, STRUCTURE, AND POLYMERIZATION MECHANISM

被引：32

作者：

KAY, E

DILKS, A

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 02期

关键词：

D O I：

10.1116/1.569966

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：428 / 430

页数：3

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[1]

Chambers R.D., 1973, FLUORINE ORGANIC CHE

[2]

CLARK DT, 1978, POLYMER SURFACES

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KAY, E .

[4]

COBURN JW, UNPUBLISHED

[5]

DILKS A, 1979, PLASMA POLYMERIZATIO

KAY, E ;

DILKS, A ;

HETZLER, U .

JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1978, A12 (09) :1393-1398

[7] PLASMA POLYMERIZATION OF SATURATED AND UNSATURATED-HYDROCARBONS [J].

KOBAYASHI, H ;

BELL, AT ;

SHEN, M .

RICE, DW ;

OKANE, DF .

[9] PLASMA FOR MODIFICATION OF POLYMERS [J].

YASUDA, H .

JOURNAL OF MACROMOLECULAR SCIENCE-CHEMISTRY, 1976, A 10 (03) :383-420