SURFACE ELECTRICAL CHANGES CAUSED BY ADSORPTION OF HYDROGEN AND OXYGEN ON SILICON

被引：22

作者：

LAW, JT

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1961年 / 32卷 / 04期

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D O I：

10.1063/1.1736056

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：600 / &

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