CHARGE-EXCHANGE NEUTRAL-ATOM FILLING OF ION DIODES - ITS EFFECT ON DIODE PERFORMANCE AND A-K SHORTING

被引：30

作者：

PRONO, DS

ISHIZUKA, H

LEE, EP

STALLARD, BW

TURNER, WC

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1981年 / 52卷 / 04期

关键词：

D O I：

10.1063/1.329045

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3004 / 3011

页数：8

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