共 6 条
[1]
ANISOTROPIC ETCHING OF SILICON
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1978, 25 (10)
:1185-1193
[2]
DECLERQ MJ, 1975, J ELECTROCHEM SOC, V122, P541
[3]
ADVANCES IN DEPOSITION PROCESSES FOR PASSIVATION FILMS
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY,
1977, 14 (05)
:1082-1099
[4]
NAUMAAN A, UNPUBLISHED
[5]
SHIBATA M, 1975, J ELECTROCHEM SOC, V122, P157, DOI 10.1149/1.2134147