EXCIMER LASER ABLATED LEAD ZIRCONATE TITANATE THIN-FILMS

被引：62

作者：

ROY, D

KRUPANIDHI, SB

DOUGHERTY, JP

机构：

[1] Materials Research Laboratory, Pennsylvania State University, University Park

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 11期

关键词：

D O I：

10.1063/1.347486

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lead zirconate titanate (PZT) thin films on platinum coated silicon were prepared by excimer laser ablation and were crystallized by subsequent annealing. Films deposited at various fluences and post-annealed showed slight variations in lead content which seemed to affect the orientation. The relatively lead rich films showed (110) orientation and the orientation changed to (111) as the Pb content decreased. Crystalline perovskite PZT films showed a dielectric constant of 800, a remnant polarization of 32-mu-C/cm2 and a coercive field of 130 kV/cm.

引用

页码：7930 / 7932

页数：3

共 9 条

[1]

BUHAY H, 1990, IN PRESS IEEE T ULTR

[2] ION-BEAM DEPOSITION OF THIN-FILMS OF FERROELECTRIC LEAD ZIRCONATE TITANATE (PZT) [J].