TRANSPORT-PROPERTIES OF COMPOSITE THIN-FILMS AND APPLICATION TO SENSORS

被引：15

作者：

HEINRICH, A

GLADUN, C

MONCH, I

机构：

[1] IFW Dresden e.V., Institut für Festkörperforschung, Dresden, O-8027

来源：

INTERNATIONAL JOURNAL OF ELECTRONICS | 1992年 / 73卷 / 05期

关键词：

D O I：

10.1080/00207219208925731

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The electrical conductivity and thermopower is discussed of composite metal-nonmetal thin films with amorphous and nanodisperse microstructure, respectively. For the ternary systems CrSiO and CrSiN it is shown, that owing to their structural and compositional disorder a small temperature coefficient of resistivity can be obtained over a wide resistivity range, useful for thin film resistors and strain gauges. The thermopowers of these films are found to be essentially determined by the metallic components, which gives the possibility to make sensitive thin film thermocouples of high stability.

引用

页码：883 / 891

页数：9

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