FORMATION OF WEAR RESISTANT SURFACE-LAYERS BY ION-BEAM TECHNIQUES

被引:10
作者
WOLF, GK
机构
关键词
D O I
10.1002/mawe.19930240309
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ion beam techniques are state of the art procedures for the microelectronic industries. Recently they found more and more interest in materials science with respect to surface improvement of polymers, ceramics and metals. In this contribution at first the procedures and the equipment for ion implantation and ion beam assisted deposition are described. Then examples for basic investigations concerning the formation of bard, dense and non-porous surface coatings with potential for wear and corrosion inhibition are given. Especially the interdependency of ion beam parameters, microstructure of coating and interface and macroscopic properties of the coating/substrate system are discussed. Finally the surface treatment of piston seals, ball bearings and metal forming tools is mentioned illustrating the application potential of ion beam techniques.
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页码:109 / 119
页数:11
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