RAPID SYNTHESIS OF DIAMOND BY COUNTER-FLOW LIQUID INJECTION INTO AN ATMOSPHERIC-PRESSURE PLASMA-JET

被引:28
作者
PFENDER, E [1 ]
HAN, QY [1 ]
OR, TW [1 ]
LU, ZP [1 ]
HEBERLEIN, J [1 ]
机构
[1] UNIV MINNESOTA, DEPT MECH ENGN, MINNEAPOLIS, MN 55455 USA
关键词
D O I
10.1016/0925-9635(92)90011-C
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond films with high growth rates of up to 1 mm/h have been deposited at atmospheric pressure in a counter-flow liquid injection DC thermal plasma reactor. A variety of liquid organics has been used as precursors to deposit diamond on different substrates. Diamond films have been obtained in all cases. Scanning electron microscopy reveals that the diamond films are well-faceted. X-ray diffraction and Raman spectroscopy have confirmed the phase purity of the diamond films. Exhaust gas samples from some diamond synthesis processes have been analyzed to determine the destruction and removal efficiencies for the input liquid precursors which have been also considered as simulants of toxic wastes. © 1992.
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页码:127 / 133
页数:7
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