PHOTORESIST GRATINGS ON REFLECTING SURFACES

被引：12

作者：

KAPON, E

KATZIR, A

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1982年 / 53卷 / 03期

关键词：

D O I：

10.1063/1.329868

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1387 / 1390

页数：4

共 22 条

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