GRAPHITIZATION OF AMORPHOUS DIAMONDLIKE CARBON-FILMS BY ION-BOMBARDMENT

被引：22

作者：

GONZALEZHERNANDEZ, J

ASOMOZA, R

REYESMENA, A

RICKARDS, J

CHAO, SS

PAWLIK, D

机构：

[1] NATL POLYTECH INST,CTR INVEST & ESTUDIOS AVANZADOS,DEPT INGN ELECT,MEXICO CITY 14,DF,MEXICO

[2] NATL AUTONOMOUS UNIV MEXICO,INST FIS,MEXICO CITY 04510,DF,MEXICO

[3] ENERGY CONVERS DEVICES INC,TROY,MI 48084

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.575256

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1798 / 1802

页数：5

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